| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer, Jeroen Johannes Sophia Maria Mertens +20 more |
2022-07-05 |
| 10838310 |
Lithographic apparatus and device manufacturing method involving a heater |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer, Jeroen Johannes Sophia Maria Mertens +20 more |
2020-11-17 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer, Jeroen Johannes Sophia Maria Mertens +20 more |
2019-04-09 |
| 10095128 |
Thermal conditioning method |
Benjamin Joseph De Smet, Sjoerd Nicolaas Lambertus Donders, Adrianus Marinus Verdonck |
2018-10-09 |
| 10061213 |
Sensor, object positioning system, lithographic apparatus and device manufacturing method |
Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren +6 more |
2018-08-28 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more |
2018-05-29 |
| 9921494 |
Lithographic apparatus comprising an actuator, and method for protecting such actuator |
Sander Christiaan Broers, Sven Antoin Johan Hol, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2018-03-20 |
| 9811005 |
Lithographic apparatus and device manufacturing method |
Yang-Shan Huang |
2017-11-07 |
| 9726985 |
Stage system and a lithographic apparatus |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout |
2017-08-08 |
| 9696640 |
Lithographic apparatus |
Adrianus Hendrik Koevoets, Harmeet Singh |
2017-07-04 |
| 9684249 |
Lithographic apparatus with a metrology system for measuring a position of a substrate table |
Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders |
2017-06-20 |
| 9618859 |
Lithographic apparatus and device manufacturing method |
Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Jan Bernard Plechelmus Van Schoot, Koen Jacobus Johannes Maria Zaal |
2017-04-11 |
| 9513561 |
Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Martinus Hendricus Hoeks |
2016-12-06 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more |
2016-11-15 |
| 9470969 |
Support, lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Harmeet Singh |
2016-10-18 |
| 9410796 |
Lithographic apparatus and method |
Ruud Antonius Catharina Maria Beerens, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Raymond Wilhelmus Louis Lafarre |
2016-08-09 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch +3 more |
2016-05-03 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2016-02-23 |
| 9261798 |
Lithographic apparatus and device manufacturing method |
Yang-Shan Huang |
2016-02-16 |
| 9195150 |
Lithographic apparatus comprising a support for holding an object, and a support for use therein |
Vadim Yevgenyevich Banine, Koen Jacobus Johannes Maria Zaal, Ramin Badie, Harmeet Singh |
2015-11-24 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2015-11-17 |
| 8976335 |
Lithographic apparatus and removable member |
Ruud Antonius Catharina Maria Beerens |
2015-03-10 |
| 8947636 |
Lithographic apparatus, device manufacturing method, and substrate exchanging method |
Jan Jaap Kuit, Johannes Catharinus Hubertus Mulkens, Koen Jacobus Johannes Maria Zaal |
2015-02-03 |
| 8932042 |
Lithographic apparatus and device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Antonius Franciscus Johannes De Groot, Jeroen De Boeij |
2015-01-13 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens +7 more |
2014-12-16 |
