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Gas mixing for fast temperature control of a cooling hood |
Joost DE HOOGH, Alain Louis Claude Leroux, Alexander Marinus Arnoldus Huijberts, Christiaan Louis Valentin, Robert Coenraad Wit +3 more |
2023-06-20 |
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Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2021-05-18 |
| 11003098 |
Pellicle attachment apparatus |
Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers +19 more |
2021-05-11 |
| 10969701 |
Pellicle attachment apparatus |
Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers +19 more |
2021-04-06 |
| 10747127 |
Lithographic apparatus |
Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH, Gosse Charles De Vries +17 more |
2020-08-18 |
| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2020-07-07 |
| 10620552 |
Stage system, lithographic apparatus and device manufacturing method |
Hendrikus Herman Marie Cox, Ronald Cornelis Gerardus Gijzen, Patrick Willem Paul Limpens, Bart Friso Riedstra |
2020-04-14 |
| 10599054 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2020-03-24 |
| 10558129 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2020-02-11 |
| 10539886 |
Pellicle attachment apparatus |
Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers +19 more |
2020-01-21 |
| 10466595 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2019-11-05 |
| 10394140 |
Lithographic apparatus |
Hendrikus Herman Marie Cox, Paul Corné Henri DE WIT, Arie Jeffrey Den Boef, Adrianus Hendrik Koevoets, Jim Vincent Overkamp +1 more |
2019-08-27 |
| 10331047 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2019-06-25 |
| 10191396 |
Lithographic apparatus, object positioning system and device manufacturing method |
Paul Corné Henri DE WIT, Stijn Willem Boere, Youssef Karel Maria De Vos, Peter Paul HEMPENIUS, Nicolaas Rudolf Kemper +1 more |
2019-01-29 |
| 9946172 |
System for positioning an object in lithography |
Peter Paul HEMPENIUS, Martijn Houben, Nicolaas Rudolf Kemper, Robertus Mathijs Gerardus Rijs, Paul Corné Henri DE WIT +2 more |
2018-04-17 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2018-02-27 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2017-10-24 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2016-11-08 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam +12 more |
2015-08-04 |
| 9025135 |
Shared compliance in a rapid exchange device for reticles, and reticle stage |
Richard J. Johnson, Eric Bernard Westphal, Jeremy Heaston |
2015-05-05 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens, Theodorus Petrus Maria Cadee +7 more |
2014-12-16 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2014-06-17 |