Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681233 | Gas mixing for fast temperature control of a cooling hood | Joost DE HOOGH, Alain Louis Claude Leroux, Christiaan Louis Valentin, Robert Coenraad Wit, Dries Vaast Paul Hemschoote +3 more | 2023-06-20 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi +8 more | 2017-03-28 |
| 8970818 | Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient | Han-Kwang Nienhuys, Franciscus Johannes Joseph Janssen, Sven Pekelder, Roger W. Schmitz, Paulus Albertus Maria Gasseling | 2015-03-03 |
| 8625068 | Lithographic apparatus configured to suppress contamination from passing into the projection system and method | Han-Kwang Nienhuys, Peter Gerardus Jonkers | 2014-01-07 |