Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Florian Didier Albin Dhalluin, Mária Péter +1 more | 2020-06-30 |
| 10678140 | Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter | Vadim Yevgenyevich Banine, Han-Kwang Nienhuys | 2020-06-09 |
| 10228615 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Andrey Nikipelov, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Arjen Boogaard, Florian Didier Albin Dhalluin +5 more | 2019-03-12 |
| 10139725 | Lithographic apparatus | James Wiley, Juan Diego Arias Espinoza, Derk Servatius Gertruda Brouns, Laurentius Cornelius De Winter, Florian Didier Albin Dhalluin +1 more | 2018-11-27 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Hans Joerg Mallmann +8 more | 2017-03-28 |
| 9563137 | Lithographic apparatus and device manufacturing method | Nicolaas Arnoldus Lammers | 2017-02-07 |
| 9488922 | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices | Yuri Vainer, Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef | 2016-11-08 |
| 9298110 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof +2 more | 2016-03-29 |
| 9122178 | Object inspection systems and methods | Vitalii Ivanov, Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef, Nikolay Nikolaevich Iosad | 2015-09-01 |
| 8830455 | Inspection method and apparatus | Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Sander Frederik Wuister | 2014-09-09 |
| 8477285 | Particle cleaning of optical elements for microlithography | Dirk Heinrich Ehm, Arnoldus Jan Storm, Johannes Hubertus Josephina Moors, Almut Czap, Mona Nagel +4 more | 2013-07-02 |
| 8405825 | Method of detecting a particle and a lithographic apparatus | Vadim Yevgenyevich Banine, Christian Wagner | 2013-03-26 |