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Alexey Olegovich POLYAKOV, Erwin Paul SMAKMAN, Albertus Victor Gerardus MANGNUS |
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Transmissive diffusor |
Marcus Adrianus Van De Kerkhof, Pieter-Jan Van Zwol, Laurentius Cornelius De Winter, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV |
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Lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Satish Achanta, Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Stef Marten Johan Janssens |
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| 12055478 |
Apparatus and method for cleaning an inspection system |
Saeedeh Farokhipoor, Maarten Van Kampen |
2024-08-06 |
| 11874607 |
Method for providing a wear-resistant material on a body, and composite body |
Antonius Franciscus Johannes De Groot |
2024-01-16 |
| 11762281 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
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Membrane cleaning apparatus |
Dmitry KURILOVICH, Fabio SBRIZZAI, Marcus Adrianus Van De Kerkhof, Ties Wouter VAN DER WOORD, Willem Joan Van Der Zande +2 more |
2023-06-13 |
| 11550234 |
Object in a lithographic apparatus |
Johan Franciscus Maria Beckers |
2023-01-10 |
| 11287752 |
Cooling apparatus and plasma-cleaning station for cooling apparatus |
Adrianus Hendrik Koevoets, Cornelis Adrianus De Meijere, Willem Michiel De Rapper, Sjoerd Nicolaas Lambertus Donders, Jan Groenewold +4 more |
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End facet protection for a radiation source and a method for use in metrology applications |
Patrick Sebastian Uebel, Amir ABDOLVAND, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Natallia Eduardauna Uzunbajakava |
2022-03-29 |
| 11170907 |
Radioisotope production |
Pieter Willem Herman De Jager, Sipke Jacob Bijlsma, Olav Waldemar Vladimir Frijns, Nicolaas Ten Kate, Antonius Theodorus Anna Maria Derksen +3 more |
2021-11-09 |
| 11143975 |
Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off |
Vadim Yevgenyevich Banine, Joost André KLUGKIST, Maxim Aleksandrovich Nasalevich, Roland Johannes Wilhelmus Stas, Sando Wricke |
2021-10-12 |
| 11048180 |
Component for use in a patterning device environment |
Vadim Yevgenyevich Banine, Christian Gerardus Norbertus Hendricus Marie Cloin, Edwin Te Sligte, Marcus Adrianus Van De Kerkhof, Ferdinandus Martinus Jozef Henricus Van De Wetering |
2021-06-29 |
| 10976196 |
Sensor mark and a method of manufacturing a sensor mark |
Joost André KLUGKIST, Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich +4 more |
2021-04-13 |
| 10948837 |
Information determining apparatus and method |
An Lin Gao, Sanjaysingh Lalbahadoersing, Alexey Olegovich POLYAKOV, Brennan Peterson |
2021-03-16 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2021-02-02 |
| 10884339 |
Lithographic method |
Wouter Joep ENGELEN, Otger Jan Luiten, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Erik Roelof Loopstra |
2021-01-05 |
| 10588211 |
Radiation source having debris control |
Rolf Theodorus Nicolaas Beijsens, Kornelis Frits Feenstra, Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen, Niek Antonius Jacobus Maria Kleemans +3 more |
2020-03-10 |
| 10580545 |
Beam delivery apparatus and method |
Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more |
2020-03-03 |
| 10468225 |
Electron source for a free electron laser |
Gerrit Jacobus Hendrik Brussaard, Wouter Joep ENGELEN |
2019-11-05 |
| 10437154 |
Lithographic method |
Olav Waldemar Vladimir Frijns, Erik Roelof Loopstra, Wouter Joep ENGELEN, Johannes Antonius Gerardus Akkermans |
2019-10-08 |
| 10228615 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane |
Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Arjen Boogaard, Florian Didier Albin Dhalluin, Alexey Sergeevich Kuznetsov +5 more |
2019-03-12 |
| 10103508 |
Electron injector and free electron laser |
Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more |
2018-10-16 |
| 10031422 |
Lithographic apparatus |
Vadim Yevgenyevich Banine, Andrei Mikhailovich Yakunin |
2018-07-24 |