Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050392 | Waveguides and manufacturing methods thereof | Johannes Richard Karl KOHLER | 2024-07-30 |
| 11347155 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | David O Dwyer, Petrus Wilhelmus SMORENBURG | 2022-05-31 |
| 11223181 | High harmonic generation radiation source | Petrus Wilhelmus SMORENBURG, David O Dwyer | 2022-01-11 |
| 10900829 | Radiation sensor apparatus | Vadim Yevgenyevich Banine, Willem Jakobus Cornelis Koppert, Otger Jan Luiten, Han-Kwang Nienhuys, Job Beckers +1 more | 2021-01-26 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Niels Geypen, Peter Danny Van Voorst, Sander Bas Roobol | 2020-06-02 |
| 10642172 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | David O Dwyer, Petrus Wilhelmus SMORENBURG | 2020-05-05 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders +2 more | 2020-04-21 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders +2 more | 2020-01-07 |
| 10468225 | Electron source for a free electron laser | Andrey Nikipelov, Wouter Joep ENGELEN | 2019-11-05 |
| 10362665 | Methods and apparatus for optical metrology | Petrus Wilhelmus SMORENBURG, Vadim Yevgenyevich Banine | 2019-07-23 |
| 9853412 | Radiation source | Andrey Nikipelov, Teis Johan Coenen, Wouter Joep ENGELEN, Gijsbertus Geert Poorter, Erik Roelof Loopstra | 2017-12-26 |