Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411421 | Metrology apparatus based on high harmonic generation and associated method | Peter Michael KRAUS, Sylvianne Dorothea Christina ROSCAM ABBING, Filippo CAMPI, ZhuangYan ZHANG, Nan Lin +2 more | 2025-09-09 |
| 12196688 | Method and apparatus for efficient high harmonic generation | — | 2025-01-14 |
| 12044951 | Illumination source and associated metrology apparatus | Wenjie JIN, Nan Lin, Christina Lynn PORTER | 2024-07-23 |
| 11347155 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | David O Dwyer, Gerrit Jacobus Hendrik Brussaard | 2022-05-31 |
| 11223181 | High harmonic generation radiation source | Gerrit Jacobus Hendrik Brussaard, David O Dwyer | 2022-01-11 |
| 10996568 | Methods and apparatus for metrology | Seyed Iman Mossavat, Teis Johan Coenen | 2021-05-04 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Teis Johan Coenen, Niels Geypen, Peter Danny Van Voorst, Sander Bas Roobol | 2020-06-02 |
| 10642172 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | David O Dwyer, Gerrit Jacobus Hendrik Brussaard | 2020-05-05 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders +2 more | 2020-04-21 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders +2 more | 2020-01-07 |
| 10381796 | Free electron laser | Johannes Antonius Gerardus Akkermans | 2019-08-13 |
| 10362665 | Methods and apparatus for optical metrology | Gerrit Jacobus Hendrik Brussaard, Vadim Yevgenyevich Banine | 2019-07-23 |