Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204298 | Methods of modelling systems for performing predictive maintenance of systems, such as lithographic systems | Carlo LANCIA, Anjan Prasad Gantapara, Dirk-Jan Kernkamp, Alexander Ypma | 2025-01-21 |
| 11556060 | Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus | Bastiaan Onne Fagginger Auer, Remco Dirks, Alexandru ONOSE, Hugo Augustinus Joseph Cramer | 2023-01-17 |
| 11392043 | Method and metrology apparatus for determining estimated scattered radiation intensity | Remco Dirks, Hendrik Jan Hidde Smilde | 2022-07-19 |
| 10996568 | Methods and apparatus for metrology | Petrus Wilhelmus SMORENBURG, Teis Johan Coenen | 2021-05-04 |
| 10901323 | Metrology method and apparatus with increased bandwidth | Hugo Augustinus Joseph Cramer, Paul Christiaan Hinnen | 2021-01-26 |
| 10732514 | Metrology method and apparatus with increased bandwidth | Hugo Augustinus Joseph Cramer, Paul Christiaan Hinnen | 2020-08-04 |
| 10627213 | Statistical hierarchical reconstruction from metrology data | Remco Dirks, Hugo Augustinus Joseph Cramer | 2020-04-21 |
| 10429746 | Estimation of data in metrology | Alexandru ONOSE, Thomas Theeuwes | 2019-10-01 |
| 10369752 | Metrology method and apparatus, computer program and lithographic system | Adriaan Johan Van Leest | 2019-08-06 |
| 10156797 | Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing method | Hugo Augustinus Joseph Cramer, Maurits Van Der Schaar | 2018-12-18 |
| 10151985 | Process flagging and cluster detection without requiring reconstruction | Remco Dirks, Hugo Augustinus Joseph Cramer | 2018-12-11 |
| 9760018 | Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure | Hugo Augustinus Joseph Cramer, Willem Jan Grootjans, Adriaan Johan Van Leest | 2017-09-12 |