Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11994806 | Metrology method and apparatus, computer program and lithographic system | Alexandru ONOSE, Roger Hubertus Elisabeth Clementine Bosch, Sander Silvester Adelgondus Marie JACOBS, Frank Jaco BUIJNSTERS, Siebe Tjerk De Zwart +2 more | 2024-05-28 |
| 11556060 | Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus | Seyed Iman Mossavat, Bastiaan Onne Fagginger Auer, Alexandru ONOSE, Hugo Augustinus Joseph Cramer | 2023-01-17 |
| 11429763 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Markus Gerardus Martinus Maria Van Kraaij, Maxim PISARENCO | 2022-08-30 |
| 11392043 | Method and metrology apparatus for determining estimated scattered radiation intensity | Seyed Iman Mossavat, Hendrik Jan Hidde Smilde | 2022-07-19 |
| 10627213 | Statistical hierarchical reconstruction from metrology data | Seyed Iman Mossavat, Hugo Augustinus Joseph Cramer | 2020-04-21 |
| 10592618 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Markus Gerardus Martinus Maria Van Kraaij, Maxim PISARENCO | 2020-03-17 |
| 10151985 | Process flagging and cluster detection without requiring reconstruction | Seyed Iman Mossavat, Hugo Augustinus Joseph Cramer | 2018-12-11 |
| 8706455 | Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures | Martijn Constant Van Beurden, Irwan Dani Setija | 2014-04-22 |
| 8645109 | Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures | Irwan Dani Setija, Markus Gerardus Martinus Maria Van Kraaij, Martijn Constant Van Beurden | 2014-02-04 |