Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326407 | Inspection apparatus and inspection method | Nitish Kumar, Richard Quintanilha, Konstantin Tsigutkin, Willem Marie Julia Marcel Coene | 2025-06-10 |
| 12271114 | Method and apparatus for predicting substrate image | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Maxim PISARENCO, Stefan Hunsche | 2025-04-08 |
| 11982946 | Metrology targets | Nikhil Mehta, Maurits Van Der Schaar, Hugo Augustinus Joseph Cramer, Olger Victor Zwier, Jeroen COTTAAR +1 more | 2024-05-14 |
| 11720029 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2023-08-08 |
| 11692948 | Inspection apparatus and inspection method | Nitish Kumar, Richard Quintanilha, Konstantin Tsigutkin, Willem Marie Julia Marcel Coene | 2023-07-04 |
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2022-12-13 |
| 11429763 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Remco Dirks, Maxim PISARENCO | 2022-08-30 |
| 11347151 | Methods and apparatus for calculating electromagnetic scattering properties of a structure | Maxim PISARENCO, Richard Quintanilha | 2022-05-31 |
| 11143970 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2021-10-12 |
| 11119414 | Yield estimation and control | Scott Anderson Middlebrooks, Willem Coene, Frank Arnoldus Johannes Maria Driessen, Adrianus Cornelis Matheus Koopman | 2021-09-14 |
| 11067901 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Maxim PISARENCO | 2021-07-20 |
| 11041816 | Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures | Maxim PISARENCO, Frank Schneider, Martijn Constant Van Beurden | 2021-06-22 |
| 11022900 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stefan Hunsche | 2021-06-01 |
| 10983445 | Method and apparatus for measuring a parameter of interest using image plane detection techniques | Nitesh Pandey, Zili Zhou, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen +7 more | 2021-04-20 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2021-03-23 |
| 10795269 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Zili Zhou, Gerbrand Van Der Zouw, Nitesh Pandey, Martinus Hubertus Maria Van Weert, Anagnostis Tsiatmas +2 more | 2020-10-06 |
| 10761432 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stefan Hunsche | 2020-09-01 |
| 10732513 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2020-08-04 |
| 10725386 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar | 2020-07-28 |
| 10649345 | Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate | Maxim PISARENCO, Sebastianus Adrianus GOORDEN | 2020-05-12 |
| 10627723 | Yield estimation and control | Scott Anderson Middlebrooks, Willem Coene, Frank Arnoldus Johannes Maria Driessen, Adrianus Cornelis Matheus Koopman | 2020-04-21 |
| 10607334 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Maxim PISARENCO, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2020-03-31 |
| 10592618 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Remco Dirks, Maxim PISARENCO | 2020-03-17 |
| 10437157 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2019-10-08 |
| 10331041 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar | 2019-06-25 |