Issued Patents All Time
Showing 25 most recent of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386268 | Method for calibrating simulation process based on defect-based process window | Koenraad VAN INGEN SCHENAU, Abraham SLACHTER, Vadim Yourievich TIMOSHKOV, Marleen KOOIMAN, Marie-Claire VAN LARE +5 more | 2025-08-12 |
| 12360461 | Identification of hot spots or defects by machine learning | Jing Su, Yi Zou, Chenxi Lin, Marinus Jochemsen, Yen-Wen Lu +1 more | 2025-07-15 |
| 12271114 | Method and apparatus for predicting substrate image | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Markus Gerardus Martinus Maria Van Kraaij, Maxim PISARENCO | 2025-04-08 |
| 12228862 | Selection of measurement locations for patterning processes | Hans Van Der Laan, Wim Tjibbo Tel, Marinus Jochemsen | 2025-02-18 |
| 12189307 | Metrology data correction using image quality metric | Fuming Wang, Wei Fang | 2025-01-07 |
| 12141507 | Process window optimizer | Venugopal Vellanki | 2024-11-12 |
| 12092965 | Process variability aware adaptive inspection and metrology | Venugopal Vellanki, Vivek Jain | 2024-09-17 |
| 11822255 | Process window based on defect probability | Abraham SLACHTER, Wim Tjibbo Tel, Anton Bernhard Van Oosten, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more | 2023-11-21 |
| 11720029 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Markus Gerardus Martinus Maria Van Kraaij, Adrianus Cornelis Matheus Koopman, Willem Marie Julia Marcel Coene | 2023-08-08 |
| 11681229 | Selection of measurement locations for patterning processes | Hans Van Der Laan, Wim Tjibbo Tel, Marinus Jochemsen | 2023-06-20 |
| 11669020 | Method and apparatus for pattern fidelity control | Tanbir HASAN, Vivek Jain, Bruno La Fontaine | 2023-06-06 |
| 11443083 | Identification of hot spots or defects by machine learning | Jing Su, Yi Zou, Chenxi Lin, Marinus Jochemsen, Yen-Wen Lu +1 more | 2022-09-13 |
| 11238189 | Process window optimizer | Venugopal Vellanki | 2022-02-01 |
| 11143970 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Markus Gerardus Martinus Maria Van Kraaij, Adrianus Cornelis Matheus Koopman, Willem Marie Julia Marcel Coene | 2021-10-12 |
| 11126093 | Focus and overlay improvement by modifying a patterning device | Richard Johannes Franciscus Van Haren, Reiner Maria Jungblut, Leon Paul VAN DIJK, Willem Seine Christian Roelofs, Wim Tjibbo Tel +1 more | 2021-09-21 |
| 11079687 | Process window based on defect probability | Abraham SLACHTER, Wim Tjibbo Tel, Anton Bernhard Van Oosten, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more | 2021-08-03 |
| 11022900 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Markus Gerardus Martinus Maria Van Kraaij | 2021-06-01 |
| 11003093 | Process variability aware adaptive inspection and metrology | Venugopal Vellanki, Vivek Jain | 2021-05-11 |
| 10962886 | Selection of measurement locations for patterning processes | Hans Van Der Laan, Wim Tjibbo Tel, Marinus Jochemsen | 2021-03-30 |
| 10908515 | Method and apparatus for pattern fidelity control | Tanbir HASAN, Vivek Jain, Bruno La Fontaine | 2021-02-02 |
| 10859926 | Methods for defect validation | Rafael Aldana Laso, Vivek Jain, Marinus Jochemsen, Xinjian Zhou | 2020-12-08 |
| 10852646 | Displacement based overlay or alignment | Marinus Jochemsen, Scott Anderson Middlebrooks, Te-Sheng WANG | 2020-12-01 |
| 10761432 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Markus Gerardus Martinus Maria Van Kraaij | 2020-09-01 |
| 10732513 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Markus Gerardus Martinus Maria Van Kraaij, Adrianus Cornelis Matheus Koopman, Willem Marie Julia Marcel Coene | 2020-08-04 |
| 10712672 | Method of predicting patterning defects caused by overlay error | Marinus Jochemsen, Wim Tjibbo Tel | 2020-07-14 |