Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859926 | Methods for defect validation | Stefan Hunsche, Rafael Aldana Laso, Vivek Jain, Marinus Jochemsen | 2020-12-08 |
| 10401732 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Rafael C. Howell, Yi-Fan Chen | 2019-09-03 |
| 9588438 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Rafael C. Howell, Yi-Fan Chen | 2017-03-07 |