Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12210291 | Aberration impact systems, models, and manufacturing processes | Xingyue PENG, Zhan Shi, Duan-Fu Stephen Hsu, Gerui LIU | 2025-01-28 |
| 12092963 | Method of determining characteristic of patterning process based on defect for reducing hotspot | Xingyue PENG, Duan-Fu Stephen Hsu, Qinglin Li | 2024-09-17 |
| 11977334 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Christoph Rene Konrad Cebulla Hennerkes, Zhan Shi, Xiaoyang Li, Frank Staals | 2024-05-07 |
| 11972194 | Method for determining patterning device pattern based on manufacturability | Roshni Biswas, Cuiping Zhang, Ningning Jia, Jingjing Liu, Quan Zhang | 2024-04-30 |
| 11789371 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas | 2023-10-17 |
| 11734490 | Method for determining curvilinear patterns for patterning device | Quan Zhang, Been-Der Chen, Jing Su, Yi Zou, Yen-Wen Lu | 2023-08-22 |
| 11614690 | Methods of tuning process models | Mu FENG, Mir Farrokh SHAYEGAN SALEK, Dianwen ZHU, Leiwu ZHENG, Jen-Shiang Wang | 2023-03-28 |
| 11586114 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Christoph Hennerkes, Zhan Shi, Xiaoyang Li, Frank Staals | 2023-02-21 |
| 11580289 | Method for determining patterning device pattern based on manufacturability | Roshni Biswas, Cuiping Zhang, Ningning Jia, Jingjing Liu, Quan Zhang | 2023-02-14 |
| 11506984 | Simulation of lithography using multiple-sampling of angular distribution of source radiation | Duan-Fu Stephen Hsu, Jianjun Jia | 2022-11-22 |
| 11409203 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas | 2022-08-09 |
| 11232249 | Method for determining curvilinear patterns for patterning device | Quan Zhang, Been-Der Chen, Jing Su, Yi Zou, Yen-Wen Lu | 2022-01-25 |
| 11054750 | Profile aware source-mask optimization | Duan-Fu Stephen Hsu, Feng-Liang Liu | 2021-07-06 |
| 11016395 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas | 2021-05-25 |
| 10990003 | Binarization method and freeform mask optimization flow | Duan-Fu Stephen Hsu, Jingjing Liu, Xingyue PENG | 2021-04-27 |
| 10558124 | Discrete source mask optimization | Xiaofeng Liu | 2020-02-11 |
| 10459346 | Flows of optimization for lithographic processes | Duan-Fu Stephen Hsu, Xiaofeng Liu | 2019-10-29 |
| 10401732 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Xinjian Zhou, Yi-Fan Chen | 2019-09-03 |
| 10191384 | Discrete source mask optimization | Xiaofeng Liu | 2019-01-29 |
| 10025201 | Flows of optimization for lithographic processes | Duan-Fu Stephen Hsu, Xiaofeng Liu | 2018-07-17 |
| 9588438 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Xinjian Zhou, Yi-Fan Chen | 2017-03-07 |
| 8898599 | Gradient-based pattern and evaluation point selection | Xiaofeng Liu | 2014-11-25 |