Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339591 | Determining metrics for a portion of a pattern on a substrate | Jiao Huang, Yunan ZHENG, Qian Zhao, Jiao LIANG, Yongfa Fan | 2025-06-24 |
| 11977336 | Method for improving a process for a patterning process | Jen-Shiang Wang, Qian Zhao, Yunbo Guo, Yen-Wen Lu, Qiang Zhang | 2024-05-07 |
| 11675274 | Etch bias characterization and method of using the same | Yongfa Fan, Leiwu ZHENG, Qian Zhao, Jen-Shiang Wang | 2023-06-13 |
| 11614690 | Methods of tuning process models | Mir Farrokh SHAYEGAN SALEK, Dianwen ZHU, Leiwu ZHENG, Rafael C. Howell, Jen-Shiang Wang | 2023-03-28 |
| 11567413 | Method for determining stochastic variation of printed patterns | Chang An Wang, Alvin Wang, Jiao LIANG, Jen-Shiang Wang | 2023-01-31 |
| 11314172 | Instant tuning method for accelerating resist and etch model calibration | Hongfei SHI, Jinze Wang, Pengcheng YANG, Lei Wang | 2022-04-26 |