Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314172 | Instant tuning method for accelerating resist and etch model calibration | Hongfei SHI, Pengcheng YANG, Lei Wang, Mu FENG | 2022-04-26 |
| 9547181 | Diffractive optical element, design method thereof and application thereof to solar cell | Guozhen Yang, Bizhen Dong, Yan Zhang, Jiasheng Ye, Qingbo Meng +1 more | 2017-01-17 |