Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567413 | Method for determining stochastic variation of printed patterns | Alvin Wang, Jiao LIANG, Jen-Shiang Wang, Mu FENG | 2023-01-31 |
| 8612904 | Use of polarization and composite illumination source for advanced optical lithography | Norman Chen, Chidam Kallingal | 2013-12-17 |