Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443055 | Methods for retargeting circuit design layouts and for fabricating semiconductor devices using retargeted layouts | Ayman Hamouda, Norman Chen | 2016-09-13 |
| 9064086 | Retargeting semiconductor device shapes for multiple patterning processes | Yuyang Sun, Norman Chen | 2015-06-23 |
| 8910094 | Retargeting semiconductor device shapes for multiple patterning processes | Yuyang Sun, Norman Chen | 2014-12-09 |
| 8612904 | Use of polarization and composite illumination source for advanced optical lithography | Chang An Wang, Norman Chen | 2013-12-17 |
| 7776494 | Lithographic mask and methods for fabricating a semiconductor device | Norman Chen | 2010-08-17 |
| 7071124 | Method to reduce PEB sensitivity of resist | Hoyoung Kang, Prakash Krishnan | 2006-07-04 |