Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354991 | Replacement buried power rail in backside power delivery | Lars Liebmann, Jeffrey Smith, Anton J. deVilliers, Daniel Chanemougame | 2025-07-08 |
| 12341053 | System for backside deposition of a substrate | Ronald Nasman, Gerrit J. Leusink, Rodney L. Robison, Daniel Fulford | 2025-06-24 |
| 12119643 | Data collection apparatus of power system | — | 2024-10-15 |
| 11908728 | System for backside deposition of a substrate | Ronald Nasman, Gerrit J. Leusink, Rodney L. Robison, Daniel Fulford | 2024-02-20 |
| 11791167 | Cyclic self-limiting etch process | Anthony R. Schepis | 2023-10-17 |
| 11567407 | Method for globally adjusting spacer critical dimension using photo-active self-assembled monolayer | Richard A. Farrell, David L. O'Meara | 2023-01-31 |
| 11484993 | Substrate holding apparatus and method for shape metrology | Anton J. deVilliers | 2022-11-01 |
| 11460775 | Method and system for prevention of metal contamination by using a self-assembled monolayer coating | Anton J. deVilliers, Corey Lemley | 2022-10-04 |
| 11314166 | Fast imprint lithography | — | 2022-04-26 |
| 11247309 | Substrate holding apparatus and method for shape metrology | Anton J. deVilliers | 2022-02-15 |
| 11193314 | Emergency escape apparatus for a building | — | 2021-12-07 |
| 11043378 | Systems and methods for inhibiting detectivity, metal particle contamination, and film growth on wafers | Corey Lemley, Richard Farrell | 2021-06-22 |
| 10890843 | Fast imprint lithography | — | 2021-01-12 |
| 10784100 | Back-side friction reduction of a substrate | — | 2020-09-22 |
| 10707070 | Methods and systems for coating a substrate with a fluid | — | 2020-07-07 |
| 10525416 | Method of liquid filter wetting | Anton J. deVilliers, Corey Lemley | 2020-01-07 |
| 10504715 | Back-side friction reduction of a substrate | — | 2019-12-10 |
| 10115726 | Method and system for forming memory fin patterns | Anton J. deVilliers | 2018-10-30 |
| 10068764 | Selective metal oxide deposition using a self-assembled monolayer surface pretreatment | Kandabara Tapily, Gerrit J. Leusink, Cory Wajda | 2018-09-04 |
| 9508557 | Method of improving line roughness in substrate processing | — | 2016-11-29 |
| 9385129 | Method of forming a memory capacitor structure using a self-assembly pattern | — | 2016-07-05 |
| 7071124 | Method to reduce PEB sensitivity of resist | Chidam Kallingal, Prakash Krishnan | 2006-07-04 |