Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216400 | Directed self-assembly | Lior Huli | 2025-02-04 |
| 11841617 | Method of forming a narrow trench | Anton J. deVilliers, Jodi Grzeskowiak, Daniel Fulford, Jeffrey Smith | 2023-12-12 |
| 11676817 | Method for pitch split patterning using sidewall image transfer | Akiteru Ko | 2023-06-13 |
| 11567407 | Method for globally adjusting spacer critical dimension using photo-active self-assembled monolayer | Hoyoung Kang, David L. O'Meara | 2023-01-31 |
| 11398379 | Platform and method of operating for integrated end-to-end self-aligned multi-patterning process | Robert D. Clark, Kandabara Tapily, Angelique Raley, Sophie Thibaut | 2022-07-26 |
| 10978307 | Deposition process | David L. O'Meara, Eric Chih-Fang Liu, Soo Doo Chae | 2021-04-13 |
| 10727057 | Platform and method of operating for integrated end-to-end self-aligned multi-patterning process | Robert D. Clark, Kandabara Tapily, Angelique Raley, Sophie Thibaut | 2020-07-28 |
| 10685847 | Vertical nanowires formed on upper fin surface | Steven Bentley, Gerard Schmid, Ajey Poovannummoottil Jacob | 2020-06-16 |
| 10319637 | Method for fully self-aligned via formation using a directed self assembly (DSA) process | Nihar Mohanty, Elliott Franke | 2019-06-11 |
| 10186577 | Multiple directed self-assembly material mask patterning for forming vertical nanowires | Steven Bentley, Gerard Schmid, Ajey Poovannummoottil Jacob | 2019-01-22 |
| 10141183 | Methods of spin-on deposition of metal oxides | Nihar Mohanty, Lior Huli, Jeffrey Smith | 2018-11-27 |
| 9865682 | Directed self-assembly material etch mask for forming vertical nanowires | Steven Bentley, Gerard Schmid, Ajey Poovannummoottil Jacob | 2018-01-09 |
| 9698025 | Directed self-assembly material growth mask for forming vertical nanowires | Steven Bentley, Gerard Schmid, Ajey Poovannummoottil Jacob | 2017-07-04 |
| 9613807 | Methods for fabricating integrated circuits using directed self-assembly chemoepitaxy | Ji Xu, Gerard Schmid | 2017-04-04 |
| 9530689 | Methods for fabricating integrated circuits using multi-patterning processes | Deniz E. Civay, Jason E. Stephens, Jiong Li, Guillaume Bouche | 2016-12-27 |
| 9508562 | Sidewall image templates for directed self-assembly materials | Ji Xu, Gerard Schmid, Moshe E. Preil | 2016-11-29 |
| 9478506 | Multilayer pattern transfer for chemical guides | Gerard Schmid, Sudharshanan Raghunathan | 2016-10-25 |
| 9455154 | Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patterns | Gerard Schmid | 2016-09-27 |
| 9275896 | Methods for fabricating integrated circuits using directed self-assembly | Deniz E. Civay, Ji Xu, Gerard Schmid, Guillaume Bouche | 2016-03-01 |
| 8969207 | Methods of forming a masking layer for patterning underlying structures | Gerard Schmid, Jeremy A. Wahl, Chanro Park | 2015-03-03 |
| 8906802 | Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly process | Jeremy A. Wahl, Gerard Schmid, Chanro Park | 2014-12-09 |
| 8889343 | Optimizing lithographic processes using laser annealing techniques | Moshe E. Preil, Gerard Schmid, Ji Xu, Thomas I. Wallow | 2014-11-18 |
| 8853101 | Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithography | Gerard Schmid, Xu Ji | 2014-10-07 |
| 6511420 | Video opto-diagnostic instrument with single-adjustment focus | Lorenz Happel, Russell McCally | 2003-01-28 |