Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709422 | Gray-tone lithography for precise control of grating etch depth | Nihar Mohanty, Ankit Vora, Austin Lane, Matthew E. Colburn | 2023-07-25 |
| 11662584 | Gradient refractive index grating for display leakage reduction | Hee Yoon Lee, Yu Shi | 2023-05-30 |
| 10976483 | Variable-etch-depth gratings | Ankit Vora, Nihar Mohanty, Austin Lane, Matthew E. Colburn | 2021-04-13 |
| 10748769 | Methods and systems for patterning of low aspect ratio stacks | Angelique Raley, Sophie Thibaut | 2020-08-18 |
| 10319637 | Method for fully self-aligned via formation using a directed self assembly (DSA) process | Nihar Mohanty, Richard A. Farrell | 2019-06-11 |
| 10049892 | Method for processing photoresist materials and structures | Nihar Mohanty, Eric Chih-Fang Liu | 2018-08-14 |
| 9576812 | Partial etch memorization via flash addition | Vinayak Rastogi, Akiteru Ko, Kiyohito Ito | 2017-02-21 |