Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728176 | Treatment method | Shinya Morikita, Kensuke Taniguchi, Michiko Nakaya, Masanobu Honda | 2023-08-15 |
| 11380545 | Processing method and substrate processing apparatus | Shota Yoshimura | 2022-07-05 |
| 10950458 | Etching method | Yasutaka HAMA, Shinya Morikita | 2021-03-16 |
| 10886138 | Substrate processing method and substrate processing apparatus | Timothy Tianshyun Yang, Shinya Morikita, Michiko Nakaya, Masanobu Honda | 2021-01-05 |
| 9576812 | Partial etch memorization via flash addition | Elliott Franke, Vinayak Rastogi, Akiteru Ko | 2017-02-21 |
| 9443731 | Material processing to achieve sub-10nm patterning | David L. O'Meara, Angelique Raley, Akiteru Ko | 2016-09-13 |
| 9257280 | Mitigation of asymmetrical profile in self aligned patterning etch | Akiteru Ko, Angelique Raley | 2016-02-09 |
| 8232207 | Substrate processing method | Kosuke Ogasawara | 2012-07-31 |