Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080521 | Plasma processing method | Yuya Minoura, Taku Gohira | 2024-09-03 |
| 12071687 | Plasma processing method and plasma processing apparatus | Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Masanobu Honda, Yoshihide Kihara | 2024-08-27 |
| 11804379 | Etching method and plasma processing apparatus | Taku Gohira | 2023-10-31 |
| 11749508 | Plasma processing method | Yuya Minoura, Taku Gohira | 2023-09-05 |
| 11728176 | Treatment method | Kiyohito Ito, Shinya Morikita, Kensuke Taniguchi, Masanobu Honda | 2023-08-15 |
| 11699614 | Film deposition method and plasma processing apparatus | Masanobu Honda | 2023-07-11 |
| 11459655 | Plasma processing method and plasma processing apparatus | Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Masanobu Honda, Yoshihide Kihara | 2022-10-04 |
| 10886138 | Substrate processing method and substrate processing apparatus | Timothy Tianshyun Yang, Shinya Morikita, Kiyohito Ito, Masanobu Honda | 2021-01-05 |
| 10651044 | Processing method and plasma processing apparatus | Masanobu Honda | 2020-05-12 |
| 10504741 | Semiconductor manufacturing method and plasma processing apparatus | Masanobu Honda, Toru Hisamatsu, Masahiro Tabata | 2019-12-10 |
| 8751196 | Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatus | Tsuyoshi Moriya, Yasutoshi Umehara, Yuki KATAOKA | 2014-06-10 |
| 8263499 | Plasma processing method and computer readable storage medium | Masanobu Honda | 2012-09-11 |
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2012-08-28 |
| 7902078 | Processing method and plasma etching method | — | 2011-03-08 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2009-05-05 |