Issued Patents All Time
Showing 1–25 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412749 | Etching method and plasma processing system | Maju TOMURA | 2025-09-09 |
| 12400835 | Plasma processing method and plasma processing system | Satoshi OHUCHIDA, Koki MUKAIYAMA, Noboru Saito, Maju TOMURA | 2025-08-26 |
| 12400863 | Method for etching for semiconductor fabrication | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Takatoshi Orui, Motoi Takahashi +2 more | 2025-08-26 |
| 12387936 | Plasma processing method and plasma processing system | Kae Takahashi, Maju TOMURA | 2025-08-12 |
| 12387941 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Satoshi OHUCHIDA | 2025-08-12 |
| 12368027 | Substrate processing method and substrate processing apparatus | Takatoshi Orui, Ryutaro SUDA, Maju TOMURA, Kae KUMAGAI | 2025-07-22 |
| 12334343 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Masanobu Honda | 2025-06-17 |
| 12308212 | In-situ adsorbate formation for plasma etch process | Du Zhang, Yu-Hao Tsai, Masahiko Yokoi, Mingmei Wang | 2025-05-20 |
| 12198938 | Etching method | Takatoshi Orui, Ryutaro SUDA, Maju TOMURA | 2025-01-14 |
| 12142484 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2024-11-12 |
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Masanobu Honda | 2024-08-27 |
| 11961746 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Maju TOMURA | 2024-04-16 |
| 11955337 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Masanobu Honda | 2024-04-09 |
| 11823903 | Method for processing workpiece | Toru Hisamatsu, Tomoyuki Oishi | 2023-11-21 |
| 11798793 | Substrate processing method, component processing method, and substrate processing apparatus | Satoshi OHUCHIDA, Koki MUKAIYAMA, Yusuke WAKO, Maju TOMURA | 2023-10-24 |
| 11728166 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Hironari Sasagawa | 2023-08-15 |
| 11658036 | Apparatus for processing substrate | Masahiro Tabata | 2023-05-23 |
| 11637003 | Method for etching film and plasma processing apparatus | Tomohiko NIIZEKI, Takayuki Katsunuma, Maju TOMURA | 2023-04-25 |
| 11615964 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2023-03-07 |
| 11557485 | Plasma processing method and plasma processing apparatus | Toru Hisamatsu, Kensuke Taniguchi, Yoshinari Hatazaki | 2023-01-17 |
| 11551937 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2023-01-10 |
| 11495469 | Method for processing substrates | Toru Hisamatsu, Masanobu Honda | 2022-11-08 |
| 11495468 | Etching method and etching apparatus | Takahiro Yokoyama, Maju TOMURA, Masanobu Honda | 2022-11-08 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Masanobu Honda | 2022-10-04 |