Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431335 | Substrate processing method and substrate processing apparatus | Yuta NAKANE, Shinya Ishikawa | 2025-09-30 |
| 12354837 | Plasma processing method and plasma processing apparatus | Takahiro Yonezawa, Takayuki Katsunuma, Shinya Ishikawa, Koki Tanaka | 2025-07-08 |
| 12308241 | Plasma processing method and plasma processing apparatus | Masahiro Tabata | 2025-05-20 |
| 12125710 | Substrate processing method and substrate processing apparatus | Yusuke TAKINO | 2024-10-22 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE +4 more | 2024-10-08 |
| 12100578 | Substrate processing method | Yuta NAKANE | 2024-09-24 |
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Masanobu Honda, Yoshihide Kihara | 2024-08-27 |
| 11961746 | Substrate processing method and substrate processing apparatus | Hironari Sasagawa, Maju TOMURA, Yoshihide Kihara | 2024-04-16 |
| 11862441 | Plasma processing method and plasma processing apparatus | Hironari Sasagawa | 2024-01-02 |
| 11728166 | Substrate processing method and substrate processing apparatus | Maju TOMURA, Yoshihide Kihara, Hironari Sasagawa | 2023-08-15 |
| 11637025 | Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide | Masahiro Tabata | 2023-04-25 |
| 11574806 | Film forming method | Masahiro Tabata | 2023-02-07 |
| 11488836 | Apparatus for substrate processing | Masahiro Tabata, Toru Hisamatsu, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2022-11-01 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Masanobu Honda, Yoshihide Kihara | 2022-10-04 |
| 11450537 | Substrate processing method and substrate processing apparatus | Hironari Sasagawa, Maju TOMURA, Yoshihide Kihara | 2022-09-20 |
| 11380555 | Etching method and etching apparatus | Maju TOMURA, Hironari Sasagawa, Yoshihide Kihara | 2022-07-05 |
| 11239090 | Plasma processing method and plasma processing apparatus | Masahiro Tabata | 2022-02-01 |
| 11145518 | Method and apparatus for etching target object | Masahiro Tabata | 2021-10-12 |
| 11139169 | Etching method and etching apparatus | Satoshi OHUCHIDA, Maju TOMURA | 2021-10-05 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda +1 more | 2021-09-07 |
| 11094550 | Etching method and etching apparatus | Ryutaro SUDA | 2021-08-17 |
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Maju TOMURA, Hironari Sasagawa | 2021-02-09 |
| 10777425 | Method of processing substrate | Masahiro Tabata, Toru Hisamatsu, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2020-09-15 |
| 10755944 | Etching method and plasma processing apparatus | Masahiro Tabata | 2020-08-25 |
| 10672605 | Film forming method | Masahiro Tabata | 2020-06-02 |