Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412749 | Etching method and plasma processing system | Yoshihide Kihara | 2025-09-09 |
| 12400835 | Plasma processing method and plasma processing system | Satoshi OHUCHIDA, Koki MUKAIYAMA, Noboru Saito, Yoshihide Kihara | 2025-08-26 |
| 12387936 | Plasma processing method and plasma processing system | Kae Takahashi, Yoshihide Kihara | 2025-08-12 |
| 12387941 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Yoshihide Kihara, Satoshi OHUCHIDA | 2025-08-12 |
| 12368027 | Substrate processing method and substrate processing apparatus | Takatoshi Orui, Ryutaro SUDA, Yoshihide Kihara, Kae KUMAGAI | 2025-07-22 |
| 12341020 | Substrate processing method and substrate processing apparatus | Ryutaro SUDA | 2025-06-24 |
| 12198938 | Etching method | Takatoshi Orui, Ryutaro SUDA, Yoshihide Kihara | 2025-01-14 |
| 12142484 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2024-11-12 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE, Shinya Ishikawa +4 more | 2024-10-08 |
| 12062522 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2024-08-13 |
| 12051570 | Plasma processing apparatus | Ryohei TAKEDA, Ryuichi TAKASHIMA, Yoshinobu Ooya | 2024-07-30 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Kenji Ouchi, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |
| 11961746 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Yoshihide Kihara | 2024-04-16 |
| 11810791 | Etching method, substrate processing apparatus, and substrate processing system | Hironari Sasagawa | 2023-11-07 |
| 11798793 | Substrate processing method, component processing method, and substrate processing apparatus | Satoshi OHUCHIDA, Koki MUKAIYAMA, Yusuke WAKO, Yoshihide Kihara | 2023-10-24 |
| 11728166 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Yoshihide Kihara, Hironari Sasagawa | 2023-08-15 |
| 11637003 | Method for etching film and plasma processing apparatus | Tomohiko NIIZEKI, Takayuki Katsunuma, Yoshihide Kihara | 2023-04-25 |
| 11615964 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-03-07 |
| 11551937 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-01-10 |
| 11495468 | Etching method and etching apparatus | Takahiro Yokoyama, Yoshihide Kihara, Masanobu Honda | 2022-11-08 |
| 11482425 | Etching method and etching apparatus | Ryutaro SUDA | 2022-10-25 |
| 11456180 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2022-09-27 |
| 11450537 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Yoshihide Kihara | 2022-09-20 |
| 11417535 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Yoshihide Kihara, Satoshi OHUCHIDA | 2022-08-16 |