Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374543 | Recess filling method and substrate processing apparatus | Yusuke Suzuki | 2025-07-29 |
| 12344933 | SiN film embedding method | Yusuke Suzuki | 2025-07-01 |
| 12331403 | Substrate processing method and substrate processing device | — | 2025-06-17 |
| 12312683 | Substrate processing method and substrate processing device | Tadashi MITSUNARI, Hiroyuki Onoda | 2025-05-27 |
| 12020900 | Plasma processing device, and plasma processing method | Satoru Kawakami, Tsuyoshi Moriya, Tatsuo Matsudo, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Maju TOMURA, Kenji Ouchi, Hiroki Murakami +1 more | 2024-05-28 |
| 11658008 | Film forming apparatus and film forming method | Yusuke Suzuki, Shinya Iwashita, Tadashi MITSUNARI | 2023-05-23 |
| 11626330 | Film forming method and film forming apparatus | Yuji OTSUKI, Yusuke Suzuki | 2023-04-11 |
| 10643839 | Film forming apparatus and film forming method | Ayuta Suzuki, Kosuke Yamamoto, Kazuyoshi Matsuzaki, Tsuyoshi Moriya, Tadashi MITSUNARI +1 more | 2020-05-05 |
| 10378104 | Process for producing carbon nanotubes and method for forming wiring | Daisuke Nishide, Takashi Matsumoto | 2019-08-13 |
| 10121680 | Substrate processing apparatus | Ayuta Suzuki, Kosuke Yamamoto, Tsuyoshi Moriya, Kazuyoshi Matsuzaki | 2018-11-06 |
| 9822009 | Method for producing graphene | Takashi Matsumoto, Daisuke Nishide | 2017-11-21 |
| 9702039 | Graphene forming method | Daisuke Nishide, Takashi Matsumoto, Ryota IFUKU | 2017-07-11 |