Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404583 | Transition metal nitride deposition method | Elina Färm, Jan Willem Maes, Charles Dezelah | 2025-09-02 |
| 12406881 | Methods and systems for filling a gap | Elina Färm, Charles Dezelah, Jan Willem Maes, Timothee Blanquart, René Henricus Jozef Vervuurt +5 more | 2025-09-02 |
| 12362143 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Tadashi MITSUNARI, Yusuke Suzuki | 2025-07-15 |
| 12217954 | Method of cleaning a surface | Shaoren Deng, Andrea Illiberi, Daniele Chiappe, Eva Tois, Giuseppe Alessio Verni +8 more | 2025-02-04 |
| 12027344 | Film forming apparatus | Ayuta Suzuki, Takahiro SHINDO, Kazuki DEMPOH, Tatsuo Matsudo, Yasushi Morita +2 more | 2024-07-02 |
| 11885014 | Transition metal nitride deposition method | Elina Färm, Jan Willem Maes, Charles Dezelah | 2024-01-30 |
| 11854876 | Systems and methods for cobalt metalization | Chiyu Zhu, Jan Willem Maes, Jiyeon Kim | 2023-12-26 |
| 11658008 | Film forming apparatus and film forming method | Munehito KAGAYA, Yusuke Suzuki, Tadashi MITSUNARI | 2023-05-23 |
| 11463451 | Control apparatus, access control method, and non-transitory recording medium storing a plurality of instructions | — | 2022-10-04 |
| 11450512 | Plasma processing method | Takamichi Kikuchi, Naotaka Noro, Toshio Hasegawa, Tsuyoshi Moriya | 2022-09-20 |
| 11081322 | Film forming apparatus, cleaning method for film forming apparatus and recording medium | Naotaka Noro, Toshio Hasegawa, Tamaki Takeyama, Katsuhito Hirose | 2021-08-03 |
| 11038872 | Network device, information processing apparatus, authentication method, and recording medium | — | 2021-06-15 |
| 10872764 | Film forming method | Takamichi Kikuchi, Naotaka Noro, Toshio Hasegawa, Tsuyoshi Moriya | 2020-12-22 |
| 10721235 | Communication system, communication control apparatus, and recording medium | — | 2020-07-21 |