Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087562 | Substrate processing apparatus, substrate processing system, and abnormality detection method | Kazushi Hikawa | 2024-09-10 |
| 11873560 | Abnormality detection system and control board | Toshio Hasegawa, Shohei Yoshida, Takeshi Shinohara, Shinji Kawasaki | 2024-01-16 |
| 11276592 | Processing apparatus and processing method | Koichi Miyashita, Hiroshi Hirose, Satoshi Gomi, Yasunori Kumagai, Takashi Yoshiyama | 2022-03-15 |
| 11081322 | Film forming apparatus, cleaning method for film forming apparatus and recording medium | Naotaka Noro, Toshio Hasegawa, Tamaki Takeyama, Shinya Iwashita | 2021-08-03 |
| 10815567 | Deposition device and deposition method | Kunihiro Tada, Kenji Suzuki, Takeshi Shinohara | 2020-10-27 |
| 9725804 | Processing apparatus | Toshio Miyazawa | 2017-08-08 |
| 9708711 | Processing apparatus and process status checking method | Toshio Miyazawa, Toshiharu Hirata, Toshimasa Tanaka | 2017-07-18 |
| 8834631 | Processing apparatus and valve operation checking method | Toshio Miyazawa, Toshiharu Hirata, Toshimasa Tanaka | 2014-09-16 |