Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823877 | Substrate processing system, substrate processing method, and controller | Koichi Miyashita, Makoto Horikawa | 2023-11-21 |
| 11276592 | Processing apparatus and processing method | Katsuhito Hirose, Koichi Miyashita, Hiroshi Hirose, Yasunori Kumagai, Takashi Yoshiyama | 2022-03-15 |
| 9223305 | Semiconductor manufacturing system | Gaku Ikeda, Koichi Miyashita, Takamasa Chikuma, Chunmui Li, Kunio Takano | 2015-12-29 |
| 8581153 | Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus | Takashi Chino, Koichi Miyashita, Minoru Nagasawa, Yoshie Eda | 2013-11-12 |