Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8581153 | Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus | Takashi Chino, Satoshi Gomi, Koichi Miyashita, Minoru Nagasawa | 2013-11-12 |