Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318363 | Substrate processing system and substrate position correction method | Kozo Kai, Takamasa Chikuma, Keiji Osada | 2016-04-19 |
| 9223305 | Semiconductor manufacturing system | Gaku Ikeda, Koichi Miyashita, Takamasa Chikuma, Satoshi Gomi, Kunio Takano | 2015-12-29 |