Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362155 | Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatus | Manabu Nakagawasai, Takashi Ishii, Keiichi Iobe | 2025-07-15 |
| 12094700 | Film forming method, film forming apparatus, and program | — | 2024-09-17 |
| 12062559 | Substrate processing system, substrate processing method, and control program | Takafumi Matsuhashi, Minoru Nagasawa, Kunio Takano | 2024-08-13 |
| 11908712 | Semiconductor manufacturing apparatus, substrate transfer method, and program | Takafumi Matsuhashi, Kunio Takano, Minoru Nagasawa | 2024-02-20 |
| 11127615 | Substrate processing system and substrate transfer method | Takafumi Matsuhashi, Kunio Takano | 2021-09-21 |
| 11086286 | Substrate processing system, substrate processing method, and control program | Yosuke Katada, Takafumi Matsuhashi, Kunio Takano, Kouichi Nakajima | 2021-08-10 |
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara +2 more | 2019-11-05 |
| 10273571 | Film forming system | Yasunobu Suzuki | 2019-04-30 |
| 10049860 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara +2 more | 2018-08-14 |
| 9708711 | Processing apparatus and process status checking method | Katsuhito Hirose, Toshio Miyazawa, Toshimasa Tanaka | 2017-07-18 |
| 8834631 | Processing apparatus and valve operation checking method | Katsuhito Hirose, Toshio Miyazawa, Toshimasa Tanaka | 2014-09-16 |
| 8537526 | Cylindrical capacitor employing electrolyte solution | Toshiaki Shimizu, Toshitaka Hibi, Motohiro Sakata, Hideo Yokoe | 2013-09-17 |
| 8310809 | Electric double layer capacitor and method for manufacturing same | Toshiyuki Kitagawa, Toshitaka Hibi, Kouji Tsuyuki, Sayori Hirose, Keiko Hashimoto | 2012-11-13 |
| 7972649 | Thin film forming method and thin film forming apparatus | — | 2011-07-05 |