Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327744 | Substrate transfer device and substrate processing system | Tatsuo Hatano, Naoki Watanabe, Naoyuki Suzuki | 2025-06-10 |
| 12261078 | Processing method and processing apparatus | Takuya UMISE, Masato SHINADA | 2025-03-25 |
| 12211720 | Vacuum transfer device, substrate processing system, and substrate processing method | Tatsuo Hatano, Naoki Watanabe | 2025-01-28 |
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Yasuhiko Kojima, Einstein Noel Abarra | 2024-12-17 |
| 12163215 | Film forming apparatus and film forming method | Koji Maeda, Atsushi Shimada, Katsushi OIKAWA | 2024-12-10 |
| 12033878 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Naoki Watanabe, Naoyuki Suzuki | 2024-07-09 |
| 12002667 | Sputtering apparatus and method of controlling sputtering apparatus | Masato SHINADA, Einstein Noel Abarra | 2024-06-04 |
| 11901166 | Magnetron sputtering apparatus and magnetron sputtering method | Kanto Nakamura, Yusuke Kikuchi | 2024-02-13 |
| 11823879 | Film formation apparatus and film formation method | Masato SHINADA, Naoki Watanabe | 2023-11-21 |
| 11764092 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Naoki Watanabe, Naoyuki Suzuki | 2023-09-19 |
| 11542592 | Film forming system and method for forming film on substrate | Masato SHINADA, Naoki Watanabe, Hiroaki Chihaya | 2023-01-03 |
| 11410837 | Film-forming device | Hiroyuki Toshima, Tatsuo Hatano, Shinji Furukawa, Junichi Takei | 2022-08-09 |
| 11193200 | PVD processing method and PVD processing apparatus | Koji Maeda, Hiroyuki Yokohara, Hiroshi Sone | 2021-12-07 |
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2019-11-05 |
| 10392688 | Film forming apparatus | Junichi Takei, Naoyuki Suzuki | 2019-08-27 |
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tadashi Mitsunaga, Tatsuo Hatano, Naoki Watanabe | 2019-06-18 |
| 10049860 | Substrate processing apparatus | Atsushi Gomi, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2018-08-14 |
| 10014145 | Vacuum exhaust method | Tomohiro Saito, Tadashi Mitsunaga, Kouji Maeda | 2018-07-03 |
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Atsushi Gomi, Toru Kitada, Kanto Nakamura | 2017-10-17 |
| 9673078 | Cooling processing apparatus and method for operating the same | Masamichi Hara, Naoyuki Suzuki, Kaoru Yamamoto, Kouji Maeda | 2017-06-06 |
| 9303788 | Load lock device | Masamichi Hara | 2016-04-05 |
| 9121515 | Gate valve unit, substrate processing device and substrate processing method thereof | Kaoru Yamamoto, Masamichi Hara | 2015-09-01 |
| 7389677 | Measuring method and device for liquid crystal viscosity coefficient | Tatsuo Uchida, Takahiro Ishinabe | 2008-06-24 |