Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394656 | Mounting table and substrate processing apparatus | Katsuyoshi Aikawa, Shinji Orimoto | 2025-08-19 |
| 12315707 | Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus | Motoi YAMAGATA, Masato SHINADA | 2025-05-27 |
| 11551918 | Film forming apparatus | Kenichi Imakita, Yasuhiko Kojima, Atsushi Gomi, Hiroyuki Yokohara | 2023-01-10 |
| 11414747 | Sputtering device | Junichi Takei, Naoyuki Suzuki, Shinji Orimoto | 2022-08-16 |
| 11282733 | Stage mechanism, processing apparatus, and method of operating the stage mechanism | Yuuki Motomura, Yasuyuki Kagaya, Naoyuki Suzuki | 2022-03-22 |
| 11193200 | PVD processing method and PVD processing apparatus | Koji Maeda, Hiroyuki Yokohara, Tetsuya Miyashita | 2021-12-07 |
| 11149342 | Sputtering apparatus | Junichi Takei | 2021-10-19 |
| 10748750 | Substrate processing apparatus | Hiroaki Chihaya | 2020-08-18 |
| 10381258 | Apparatus of processing workpiece in depressurized space | Takuya UMISE, Naoyuki Suzuki | 2019-08-13 |
| 10309005 | Deposition device and deposition method | Yasuhiko Kojima, Atsushi Gomi, Kanto Nakamura, Toru Kitada, Yasunobu Suzuki +6 more | 2019-06-04 |
| 10254693 | Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member | Hiroyuki Yokohara, Shinji Orimoto, Naoyuki Suzuki | 2019-04-09 |
| 9200362 | Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device | Ryuji Higashisaka | 2015-12-01 |
| 8920107 | Substrate support apparatus and vacuum processing apparatus | Tadashi Ikeda, Gen Goshokubo | 2014-12-30 |
| 8202034 | Vacuum processing apparatus and substrate transfer method | Ryuji Higashisaka, Kazutoshi Yoshibayashi, Tatsunori Sato, Tatsuhiro Takahashi | 2012-06-19 |
| 7770714 | Transfer apparatus | Naoyuki Nozawa, Satoshi Hitomi, Yoshiro Hasegawa | 2010-08-10 |
| 6247239 | Clinometric sensor | Yoshihisa Shijo | 2001-06-19 |
| 6032375 | Inclination sensor | Yoshihisa Shijo, Masahide Inoue, Takanobu Shiokawa | 2000-03-07 |
| 5937528 | Tilt sensor, mask and coat holder | Yoshihisa Shijo, Takanobu Shiokawa, Teruo Sakai, Yuko Ochiai, Hiroaki Fuse | 1999-08-17 |
| 5926965 | Tilt sensor and top cover plate thereof | Yoshihisa Shijo, Takanobu Shiokawa | 1999-07-27 |
| 5445157 | Thermographic endoscope | Rensuke Adachi, Chinari Tanaka | 1995-08-29 |