Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056273 | Heating apparatus, substrate heating apparatus, and method of manufacturing semiconductor device | Masao Sasaki, Kenji Sato, Kenzou Murata | 2018-08-21 |
| 8202034 | Vacuum processing apparatus and substrate transfer method | Hiroshi Sone, Ryuji Higashisaka, Tatsunori Sato, Tatsuhiro Takahashi | 2012-06-19 |