Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997386 | Substrate holder mounting device and substrate holder container chamber | Hideki Wakabayashi | 2018-06-12 |
| 9905404 | Sputtering apparatus | Satoshi Yamada | 2018-02-27 |
| 9425029 | Processing apparatus having a first shield and a second shield arranged to sandwich a substrate | Yoshihiro Muto, Satoshi Yamada | 2016-08-23 |
| 9200362 | Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device | Hiroshi Sone | 2015-12-01 |
| 8202034 | Vacuum processing apparatus and substrate transfer method | Hiroshi Sone, Kazutoshi Yoshibayashi, Tatsunori Sato, Tatsuhiro Takahashi | 2012-06-19 |