Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054841 | Apparatus for plating and method of plating | Kazuma Ideguchi, Ryuya Koizumi | 2024-08-06 |
| 11866842 | Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatus | Tensei Sato, Kazuma Ideguchi | 2024-01-09 |
| 11661669 | Substrate processing system, controller and method using test operation without substrate | Kazuma Ideguchi, Shugo Midorikawa, Yosuke Nagasawa, Tensei Sato | 2023-05-30 |
| 9997386 | Substrate holder mounting device and substrate holder container chamber | Ryuji Higashisaka | 2018-06-12 |