| 12191178 |
Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus |
Jumpei Fujikata, Yuji Araki, Ryuya Koizumi |
2025-01-07 |
| 11866842 |
Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatus |
Hideki Wakabayashi, Kazuma Ideguchi |
2024-01-09 |
| 11661669 |
Substrate processing system, controller and method using test operation without substrate |
Kazuma Ideguchi, Shugo Midorikawa, Yosuke Nagasawa, Hideki Wakabayashi |
2023-05-30 |
| 11315812 |
Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus |
Jumpei Fujikata, Yuji Araki, Ryuya Koizumi |
2022-04-26 |