Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054841 | Apparatus for plating and method of plating | Hideki Wakabayashi, Ryuya Koizumi | 2024-08-06 |
| 11866842 | Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatus | Hideki Wakabayashi, Tensei Sato | 2024-01-09 |
| 11661669 | Substrate processing system, controller and method using test operation without substrate | Shugo Midorikawa, Yosuke Nagasawa, Tensei Sato, Hideki Wakabayashi | 2023-05-30 |