Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261078 | Processing method and processing apparatus | Masato SHINADA, Tetsuya Miyashita | 2025-03-25 |
| 11476140 | Substrate accommodating unit and maintenance method for vacuum transfer unit in substrate transfer apparatus | — | 2022-10-18 |
| 11189514 | Substrate processing apparatus and substrate transfer method | — | 2021-11-30 |
| 10381258 | Apparatus of processing workpiece in depressurized space | Hiroshi Sone, Naoyuki Suzuki | 2019-08-13 |