Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327744 | Substrate transfer device and substrate processing system | Tatsuo Hatano, Tetsuya Miyashita, Naoki Watanabe | 2025-06-10 |
| 12033878 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Tetsuya Miyashita, Naoki Watanabe | 2024-07-09 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Tamaki Takeyama, Kazunaga ONO, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |
| 11764092 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Tetsuya Miyashita, Naoki Watanabe | 2023-09-19 |
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Manabu Nakagawasai, Shinji Orimoto, Hiroyuki Yokohara | 2023-03-14 |
| 11414747 | Sputtering device | Junichi Takei, Hiroshi Sone, Shinji Orimoto | 2022-08-16 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Shinji Orimoto, Hiroyuki Yokohara, Motoi YAMAGATA, Koji Maeda | 2022-08-16 |
| 11293092 | Stage device and processing apparatus | Manabu Nakagawasai, Shinji Orimoto | 2022-04-05 |
| 11282733 | Stage mechanism, processing apparatus, and method of operating the stage mechanism | Yuuki Motomura, Hiroshi Sone, Yasuyuki Kagaya | 2022-03-22 |
| 10910215 | Method of forming later insulating films for MTJ | Naoki Watanabe, Tatsuo Hatano, Shinji Furukawa | 2021-02-02 |
| 10772983 | Perfume retainer member and aroma provision device | Shuji Fujita, Tsunetoshi Samukawa, Koya Nomoto, Yuji Ishigaki, Hideki Nakano +1 more | 2020-09-15 |
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara +2 more | 2019-11-05 |
| 10392688 | Film forming apparatus | Junichi Takei, Tetsuya Miyashita | 2019-08-27 |
| 10381258 | Apparatus of processing workpiece in depressurized space | Takuya UMISE, Hiroshi Sone | 2019-08-13 |
| 10254693 | Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member | Hiroyuki Yokohara, Shinji Orimoto, Hiroshi Sone | 2019-04-09 |
| 10068798 | Method and processing apparatus for performing pre-treatment to form copper wiring in recess formed in substrate | Hiroyuki Toshima, Tatsuo Hatano, Shinji Furukawa, Naoki Watanabe | 2018-09-04 |
| 10049860 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara +2 more | 2018-08-14 |
| 9787222 | Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus | Kaoru Yamamoto, Shinji Orimoto | 2017-10-10 |
| 9673078 | Cooling processing apparatus and method for operating the same | Tetsuya Miyashita, Masamichi Hara, Kaoru Yamamoto, Kouji Maeda | 2017-06-06 |
| 9607868 | Substrate heat treatment apparatus | Takuji Okada, Toshikazu Nakazawa | 2017-03-28 |
| 9224546 | Brake drive controlling device for promptly switching state of brake from released state to fastened state | Yasuyuki Matsumoto | 2015-12-29 |
| 8847539 | Servomotor drive device that drives servomotor connected to rotating shaft | Yasuyuki Matsumoto | 2014-09-30 |
| 8378576 | Ion beam generator | Einstein Noel Abarra, Yasushi Miura, Eiji FUJIYAMA, Yasuyuki Taneda, Yasushi Kamiya | 2013-02-19 |
| 8336711 | Case for rolled object | Mamoru Katsurayama, Kozo Ushirobata, Takeshi Yokomaku, Akira Sakou | 2012-12-25 |
| 7898196 | Motor driving apparatus for driving and braking brake-equipped motor | Shinichi Horikoshi, Tsutomu Shikagawa | 2011-03-01 |