Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Tamaki Takeyama, Hiroaki Chihaya, Motoi YAMAGATA, Shinji Orimoto | 2025-08-19 |
| 12362155 | Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatus | Toshiharu Hirata, Takashi Ishii, Keiichi Iobe | 2025-07-15 |
| 12211706 | Substrate processing device and method of manufacturing substrate processing device | Satoshi Takeda | 2025-01-28 |
| 12167542 | Method for manufacturing substrate with sensor | Motoi YAMAGATA | 2024-12-10 |
| 11867458 | Temperature sensor, temperature measuring device, and temperature measuring method | — | 2024-01-09 |
| 11608555 | Sputtering apparatus | — | 2023-03-21 |
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara | 2023-03-14 |
| 11532784 | Substrate processing apparatus and method | Koji Maeda, Shinji Orimoto, Motoi YAMAGATA | 2022-12-20 |
| 11417504 | Stage device and processing apparatus | Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara, Motoi YAMAGATA, Koji Maeda | 2022-08-16 |
| 11293092 | Stage device and processing apparatus | Naoyuki Suzuki, Shinji Orimoto | 2022-04-05 |
| 10847399 | Movable structure and film forming apparatus | — | 2020-11-24 |