Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Tamaki Takeyama, Hiroaki Chihaya, Manabu Nakagawasai, Shinji Orimoto | 2025-08-19 |
| 12315707 | Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus | Hiroshi Sone, Masato SHINADA | 2025-05-27 |
| 12167542 | Method for manufacturing substrate with sensor | Manabu Nakagawasai | 2024-12-10 |
| 11532784 | Substrate processing apparatus and method | Manabu Nakagawasai, Koji Maeda, Shinji Orimoto | 2022-12-20 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara, Koji Maeda | 2022-08-16 |