Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077848 | Vacuum processing apparatus | Kanto Nakamura, Yuki Motomura | 2024-09-03 |
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto | 2023-03-14 |
| 11551918 | Film forming apparatus | Kenichi Imakita, Yasuhiko Kojima, Atsushi Gomi, Hiroshi Sone | 2023-01-10 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Motoi YAMAGATA, Koji Maeda | 2022-08-16 |
| 11193200 | PVD processing method and PVD processing apparatus | Koji Maeda, Hiroshi Sone, Tetsuya Miyashita | 2021-12-07 |
| 10254693 | Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member | Shinji Orimoto, Hiroshi Sone, Naoyuki Suzuki | 2019-04-09 |
| 9324600 | Mounting table structure and plasma film forming apparatus | Toshiaki Fujisato, Shiro Hayashi | 2016-04-26 |
| 5148334 | Phase synchronization circuit | Takikazu Takeuchi, Takuji Ogawa, Noboru Sakurai | 1992-09-15 |