Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180580 | Film forming position misalignment correction method and film forming system | Atsushi Takeuchi, Kazunaga ONO, Atsushi Gomi | 2024-12-31 |
| 12077848 | Vacuum processing apparatus | Hiroyuki Yokohara, Yuki Motomura | 2024-09-03 |
| 12018928 | Film thickness measurement method, film thickness measurement device, and film formation system | Kazunaga ONO, Toru Kitada, Atsushi Gomi | 2024-06-25 |
| 11901166 | Magnetron sputtering apparatus and magnetron sputtering method | Tetsuya Miyashita, Yusuke Kikuchi | 2024-02-13 |
| 11894222 | Film forming apparatus and film forming method | Atsushi Takeuchi, Toru Kitada, Atsushi Gomi | 2024-02-06 |
| 10566525 | Method for manufacturing magnetoresistive element | Hiroki Maehara, Naoki Watanabe | 2020-02-18 |
| 10309005 | Deposition device and deposition method | Yasuhiko Kojima, Hiroshi Sone, Atsushi Gomi, Toru Kitada, Yasunobu Suzuki +6 more | 2019-06-04 |
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Atsushi Gomi, Tetsuya Miyashita, Toru Kitada | 2017-10-17 |
| 9551060 | Film forming apparatus and film forming method | Atsushi Gomi, Tooru KITADA, Yasunobu Suzuki, Shinji Furukawa | 2017-01-24 |
| 9017535 | High-frequency sputtering device | Yoshinori Nagamine, Koji Tsunekawa | 2015-04-28 |