Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387922 | Film forming apparatus, processing condition determination method, and film forming method | Kenichi Imakita, Hiroaki Chihaya, Toru Kitada | 2025-08-12 |
| 12180580 | Film forming position misalignment correction method and film forming system | Atsushi Takeuchi, Kazunaga ONO, Kanto Nakamura | 2024-12-31 |
| 12018928 | Film thickness measurement method, film thickness measurement device, and film formation system | Kazunaga ONO, Kanto Nakamura, Toru Kitada | 2024-06-25 |
| 11894222 | Film forming apparatus and film forming method | Atsushi Takeuchi, Toru Kitada, Kanto Nakamura | 2024-02-06 |
| 11551918 | Film forming apparatus | Kenichi Imakita, Yasuhiko Kojima, Hiroyuki Yokohara, Hiroshi Sone | 2023-01-10 |
| 11404255 | Sputtering method and sputtering apparatus | Kazunaga ONO, Tatsuo Hatano, Yasuhiro Otagiri, Tomoyuki Fujihara, Yuuki Motomura | 2022-08-02 |
| 10468237 | Substrate processing apparatus | Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2019-11-05 |
| 10309005 | Deposition device and deposition method | Yasuhiko Kojima, Hiroshi Sone, Kanto Nakamura, Toru Kitada, Yasunobu Suzuki +6 more | 2019-06-04 |
| 10049860 | Substrate processing apparatus | Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara, Naoyuki Suzuki +2 more | 2018-08-14 |
| 9976217 | Film forming method using reversible decomposition reaction | Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto, Satoshi Taga | 2018-05-22 |
| 9790590 | Vacuum-processing apparatus, vacuum-processing method, and storage medium | Shinji Furukawa, Tetsuya Miyashita, Toru Kitada, Kanto Nakamura | 2017-10-17 |
| 9576850 | Method for manufacturing semiconductor device | Tadahiro Ishizaka, Kenji Suzuki, Tatsuo Hatano, Yasushi Mizusawa | 2017-02-21 |
| 9551060 | Film forming apparatus and film forming method | Kanto Nakamura, Tooru KITADA, Yasunobu Suzuki, Shinji Furukawa | 2017-01-24 |
| 9404180 | Deposition device | Masamichi Hara, Kaoru Yamamoto, Satoshi Taga | 2016-08-02 |
| 9202728 | Substrate mounting mechanism, and substrate processing apparatus | Masamichi Hara, Shinji Maekawa, Satoshi Taga, Kaoru Yamamoto | 2015-12-01 |
| 9062374 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Masamichi Hara, Yasushi Mizusawa, Satoshi Taga, Tatsuo Hatano | 2015-06-23 |
| 9064690 | Method for forming Cu wiring | Tadahiro Ishizaka, Kenji Suzuki, Tatsuo Hatano, Hiroyuki Toshima, Yasushi Mizusawa | 2015-06-23 |
| 8999841 | Semiconductor device manufacturing method | Tadahiro Ishizaka, Kenzi Suzuki, Tatsuo Hatano, Yasushi Mizusawa | 2015-04-07 |
| 8992686 | Mounting table structure, film forming apparatus and raw material recovery method | Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto, Satoshi Taga +1 more | 2015-03-31 |
| 8859422 | Method of forming copper wiring and method and system for forming copper film | Tadahiro Ishizaka, Takara Kato, Osamu Yokoyama, Takashi Sakuma, Chiaki Yasumuro +5 more | 2014-10-14 |
| 8408025 | Raw material recovery method and trapping mechanism for recovering raw material | Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto, Chiaki Yasumuro | 2013-04-02 |
| 8399353 | Methods of forming copper wiring and copper film, and film forming system | Tadahiro Ishizaka, Takara Kato, Osamu Yokoyama, Takashi Sakuma, Chiaki Yasumuro +4 more | 2013-03-19 |
| 8349283 | Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same | Masamichi Hara, Tatsuo Hatano | 2013-01-08 |
| 8277889 | Film formation method and film formation apparatus | Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Osamu Yokoyama, Satoshi Taga | 2012-10-02 |
| 8273409 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Masamichi Hara, Yasushi Mizusawa, Satoshi Taga, Tatsuo Hatano | 2012-09-25 |