Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676847 | Substrate placing table and substrate processing apparatus | Naoyuki Satoh, Tatsuo Nishita | 2023-06-13 |
| 11508603 | Substrate placing table and substrate processing apparatus | Naoyuki Satoh, Tatsuo Nishita | 2022-11-22 |
| 11227786 | Method of manufacturing electrostatic chuck and electrostsatic chuck | Yoshiyuki Kobayashi, Kazuya Nagaseki | 2022-01-18 |
| 11217470 | Substrate placing table and substrate processing apparatus | Naoyuki Satoh, Tatsuo Nishita | 2022-01-04 |
| 10941477 | Substrate processing apparatus and susceptor | Yoshiyuki Kobayashi | 2021-03-09 |
| 10557190 | Substrate processing apparatus and susceptor | Yoshiyuki Kobayashi | 2020-02-11 |
| 9976217 | Film forming method using reversible decomposition reaction | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto | 2018-05-22 |
| 9777362 | Electrode manufacturing apparatus for lithium ion capacitor | Yoshiyuki Kobayashi | 2017-10-03 |
| 9587300 | Electrode manufacturing apparatus for lithium ion capacitor and electrode manufacturing method therefor | Yoshiyuki Kobayashi | 2017-03-07 |
| 9404180 | Deposition device | Masamichi Hara, Kaoru Yamamoto, Atsushi Gomi | 2016-08-02 |
| 9202728 | Substrate mounting mechanism, and substrate processing apparatus | Masamichi Hara, Atsushi Gomi, Shinji Maekawa, Kaoru Yamamoto | 2015-12-01 |
| 9062374 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Masamichi Hara, Yasushi Mizusawa, Atsushi Gomi, Tatsuo Hatano | 2015-06-23 |
| 8992686 | Mounting table structure, film forming apparatus and raw material recovery method | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Kaoru Yamamoto +1 more | 2015-03-31 |
| 8277889 | Film formation method and film formation apparatus | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Masamichi Hara, Osamu Yokoyama | 2012-10-02 |
| 8273409 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Masamichi Hara, Yasushi Mizusawa, Atsushi Gomi, Tatsuo Hatano | 2012-09-25 |