Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428721 | Film forming apparatus and film forming method | Naoki Watanabe | 2025-09-30 |
| 12327744 | Substrate transfer device and substrate processing system | Tetsuya Miyashita, Naoki Watanabe, Naoyuki Suzuki | 2025-06-10 |
| 12211720 | Vacuum transfer device, substrate processing system, and substrate processing method | Naoki Watanabe, Tetsuya Miyashita | 2025-01-28 |
| 12183612 | Substrate transfer apparatus, substrate transfer method, and substrate processing system | Naoki Watanabe | 2024-12-31 |
| 12033878 | Substrate transfer apparatus and substrate processing system | Tetsuya Miyashita, Naoki Watanabe, Naoyuki Suzuki | 2024-07-09 |
| 11990357 | Substrate transport apparatus, substrate transport method, and substrate processing system | Naoki Watanabe | 2024-05-21 |
| 11764092 | Substrate transfer apparatus and substrate processing system | Tetsuya Miyashita, Naoki Watanabe, Naoyuki Suzuki | 2023-09-19 |
| 11602856 | Vacuum transfer device and substrate processing system | Naoki Watanabe | 2023-03-14 |
| 11410837 | Film-forming device | Hiroyuki Toshima, Tetsuya Miyashita, Shinji Furukawa, Junichi Takei | 2022-08-09 |
| 11404255 | Sputtering method and sputtering apparatus | Kazunaga ONO, Atsushi Gomi, Yasuhiro Otagiri, Tomoyuki Fujihara, Yuuki Motomura | 2022-08-02 |
| 11251027 | Stage device and processing apparatus | Naoki Watanabe, Koji Maeda | 2022-02-15 |
| 10910215 | Method of forming later insulating films for MTJ | Naoki Watanabe, Shinji Furukawa, Naoyuki Suzuki | 2021-02-02 |
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tadashi Mitsunaga, Tetsuya Miyashita, Naoki Watanabe | 2019-06-18 |
| 10189230 | Method for forming copper film | Hiroyuki Toshima, Atsushi Shimada, Tatsuo Hirasawa, Shinji Furukawa | 2019-01-29 |
| 10068798 | Method and processing apparatus for performing pre-treatment to form copper wiring in recess formed in substrate | Hiroyuki Toshima, Shinji Furukawa, Naoki Watanabe, Naoyuki Suzuki | 2018-09-04 |
| 9976217 | Film forming method using reversible decomposition reaction | Atsushi Gomi, Yasushi Mizusawa, Masamichi Hara, Kaoru Yamamoto, Satoshi Taga | 2018-05-22 |
| 9576850 | Method for manufacturing semiconductor device | Tadahiro Ishizaka, Atsushi Gomi, Kenji Suzuki, Yasushi Mizusawa | 2017-02-21 |
| 9362167 | Method of supplying cobalt to recess | Atsushi Shimada, Shinji Furukawa | 2016-06-07 |
| 9121094 | Sputtering method and sputtering apparatus | Kaoru Maekawa, Hiroyuki Nagai, Takashi Sakuma | 2015-09-01 |
| 9062374 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Masamichi Hara, Yasushi Mizusawa, Satoshi Taga, Atsushi Gomi | 2015-06-23 |
| 9064690 | Method for forming Cu wiring | Tadahiro Ishizaka, Atsushi Gomi, Kenji Suzuki, Hiroyuki Toshima, Yasushi Mizusawa | 2015-06-23 |
| 8999841 | Semiconductor device manufacturing method | Tadahiro Ishizaka, Atsushi Gomi, Kenzi Suzuki, Yasushi Mizusawa | 2015-04-07 |
| 8992686 | Mounting table structure, film forming apparatus and raw material recovery method | Atsushi Gomi, Yasushi Mizusawa, Masamichi Hara, Kaoru Yamamoto, Satoshi Taga +1 more | 2015-03-31 |
| 8859422 | Method of forming copper wiring and method and system for forming copper film | Tadahiro Ishizaka, Atsushi Gomi, Takara Kato, Osamu Yokoyama, Takashi Sakuma +5 more | 2014-10-14 |
| 8408025 | Raw material recovery method and trapping mechanism for recovering raw material | Atsushi Gomi, Yasushi Mizusawa, Masamichi Hara, Kaoru Yamamoto, Chiaki Yasumuro | 2013-04-02 |