Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5880526 | Barrier metal layer | Seishi Murakami | 1999-03-09 |
| 5709757 | Film forming and dry cleaning apparatus and method | Seishi Murakami, Kunihiro Tada | 1998-01-20 |
| 5704214 | Apparatus for removing tramp materials and method therefor | Yuichiro Fujikawa, Seishi Murakami | 1998-01-06 |
| 5690743 | Liquid material supply apparatus and method | Seishi Murakami | 1997-11-25 |
| 5595606 | Shower head and film forming apparatus using the same | Yuichiro Fujikawa, Seishi Murakami | 1997-01-21 |