Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325801 | Mounting table system, substrate processing apparatus, and temperature control method | Tetsuya Miyashita, Tatsuo Hatano, Naoki Watanabe | 2019-06-18 |
| 10014145 | Vacuum exhaust method | Tomohiro Saito, Kouji Maeda, Tetsuya Miyashita | 2018-07-03 |